A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

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05/2011
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Ferreira , A & Aphale , S S 2011 , ' A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems ' , IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews , vol. 41 , no. 3 , pp. 350 - 364 . https://doi.org/10.1109/TSMCC.2010.2072779
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http://hdl.handle.net/2164/2126
DOI
10.1109/TSMCC.2010.2072779
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