A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
Citation
Ferreira , A & Aphale , S S 2011 , ' A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems ' , IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews , vol. 41 , no. 3 , pp. 350 - 364 . https://doi.org/10.1109/TSMCC.2010.2072779